Vacuum Pumps

Magnetically Levitated Turbomolecular Vacuum Pumps: STP Series

An industry standard with over 130,000 units in operation worldwide, from semiconductor process tools and beyond. (Pumping speed: 300–4,500 L/s)

Ion Pumps: GAMMA Series

These pumps deliver high vacuum (HV) and ultra-high vacuum (UHV) environments for a wide range of applications, from mass spectrometers to particle accelerators.

Oil-Sealed Rotary Vane Pumps: RV (Small) and EM (Medium, Large) Series

The RV Series rotary vane pumps represent over 75 years of accumulated expertise. (Pumping speed: 3–12 m³/h)

EM Series pumps are rugged pumps designed for general industrial applications. (Pumping speed: 40–275 m³/h)

Mechanical Booster Pumps: EH Series

These pumps feature a unique dynamic drive ensure efficient power transmission with an ideal balance of economy, performance, and compactness. As it can be started simultaneously with the pump exhausting the area downstream of the booster pump, pump downtime can be reduced.

Scroll Pumps: nXDS Series

Delivers best-in-class performance with the latest design features.

Dry Vacuum Pump System: iXH Series

Dry pumps for demanding processes. These serve a wide range of processes at 300mm semiconductor fabs and flat panel display manufacturing facilities worldwide.

Industrial Dry Pumps: GXS Series

Built for robust and reliable operation, these pumps feature an onboard controller with extensive communications and automation control capabilities. An economical vacuum pump solution for industrial applications.

Compact Vacuum Pumping Units: TURBO LAB

With unprecedented connectivity options and excellent pumping performance in small pump system applications, this pump is best suited for research and development.

Oil-Sealed Rotary Vane Pumps: SOGVAC Series

The multi-vane (3-vane), single-stage design is ideal for the most demanding applications in general industry.

Compact Air-Cooled Dry Pumps: ECODRY Plus

A new air-cooled dry pump that achieves best-in-class low noise and low vibration, built on the concept of a quieter laboratory environment.

Roots Pumps: RUVAC Series

Three series are available to best suit your application. RUVAC WA/WAU, RUVAC WS/WSU, and RUVAC WH/WHU.

Dry Pumps: SCREWLINE SP Series

Employs screw technology. The air-cooled dry pump eliminates the need for cumbersome water-cooling plumbing. An ATEX-certified version for explosive environments is also available.

Leak Detectors: PHOENIX Quadro

A completely redesigned unit. A helium leak detector equipped with a 180° magnetic sector mass spectrometer for accurate and reliable leak rate measurement. Minimum detectable leak rate of 5×10⁻¹² mbarl* l/s. A compact, portable leak detector.

Scroll Pumps: ISP Series
(Equipped with Top Runner IE3 (high-efficiency) motors)

Oil-free operation with low vibration and low noise makes these pumps well suited to a wide range of fields, such as accelerators, synchrotron radiation facilities, analytical instruments, and gas recovery system. (Pumping speed: 50–1,000 L/min)

Scroll Pumps: SDM Series

A dry vacuum pump with lower noise, lower vibration, and extended maintenance intervals compared to the ISP Series. The 320 L/min class is ideal for applications such as analytical instruments and accelerators/synchrotron radiation facilities.

Scroll Pumps: DVSL Series (S-Dry)

Introducing pumps equipped with Top Runner IE3 (high-efficiency) motors! They boost excellent performance in steam exhaust. Ideal for tough applications such as degassing, defoaming, vacuum drying, and leak testing. (Pumping speed: 100–1,000 L/min)

Magnetically Levitated Turbomolecular Vacuum Pumps: STP Series

Grease-lubricated ball bearings keep the design compact, lightweight, and affordable. Its high shock resistance also enables TMP installation on portable equipment and on moving parts of system. (Pumping speed: 50–2,400 L/s)

Oil-Sealed Rotary Vacuum Pumps: P Series

The oscillating piston design delivers excellent durability and efficient pumping. (Pumping speed: 90–900 m³/h)

Roots Vacuum Pumps: RA/RD Series

The direct-drive roots vacuum pump features a compact design, making it easy to integrate into complete system.

Oil Diffusion Vacuum Pumps: ESV Series (Small Model)

To maintain stable pressure from ultra-high vacuum through high, medium, and rough vacuum ranges, models ESV-6 and below use annular heaters, while models ESV-8 and above use internal sheathed heaters, preventing pressure fluctuations caused by oil bumping under ultra-high vacuum. (Pumping speed: 380–4,500 L/s)

Screw-Type Dry Vacuum Pumps: MDP/MDP-V Series (Energy-Saving Configuration)

The highly anticipated V Series has been added to the globally recognized MDP Series. Building on the MDP Series’ high durability, these pumps improve energy efficiency and significantly reduce running costs. (5,500-27,000L/m)

Dry Screw Vacuum Pumps: BEH Series

Microcontroller-based control enables precise management of operating conditions. Delivers high performance at low rotational speeds, ideal for all processes such as CVD, PVD, etching, and sputtering. (Pumping speed: 5,000–60,000 L/min)

High Vacuum Pump Oil/Rotary Pump Oil

MR Series (petroleum-based/additive-free), Heat-Resistant Series (petroleum-based/with additives), S Series (synthetic/additive-free and with additives), Specialty Series (petroleum-based/with additives)

Cold Cathode Pirani Gauge M-361CP

A combination gauge that pairs a Pirani gauge for measuring from atmospheric pressure to medium vacuum with a cold cathode gauge for measuring from high vacuum to ultra-high vacuum. Capable of measuring a wide pressure range in a single unit.

Mini UHV Gate Valve Series 01.0

A versatile valve for applications from UHV to advanced processes (DN25-50)

High Vacuum Gate Valve Series 09

Ideal for vacuum sealing applications. Particularly suited to applications with heavy deposits (DN50-250)

UHV Gate Valve Series 10

The standard valve for R&D and industrial UHV applications. (DN63-320)

Vacuum Flanges (ISO-K, ICF, JIS) and Custom Pipe Fittings

We manufacture in-house the piping components such as flanges that are essential for vacuum equipment. The quick-delivery system we have established for a wide range of piping components ensures smoother equipment startup when installing vacuum pumps. Sold directly from our factory, these products offer exceptional value and have earned high praise from many customers. Our Higashi-Osaka (Takaida) factory also handles the design and manufacture of original parts and other metal component processing.