PRODUCTS

Optical Endpoint Detector for Ion Beam Etching

High-Precision Detector for Real-Time Etch Process Monitoring and Endpoint Detection

Verity spectrographs (SD1024/SD2048 Series) deliver endpoint detection for all dry etching processes, as well as ion beam etching. These system are essential for precise process control.

System Overview

Role and Applications

The system monitors etch processes in real time, accurately detecting when interlayer boundaries or the substrate have been reached. This contributes to improved yield and process stability.

Compatible Applications

Compatible with a wide range of processes, including plasma etching, ion beam etching, ashing/photoresist stripping, plasma ion implantation, CVD, CMP, bevel etching, and reactive sputtering.

System Features

Cutting-edge Detection Algorithms and Software Control

EP Designer Multi-Wavelength Algorithm

Features a built-in library that can identify film types from composite wavelength data within a given time window. Its powerful detection capabilities accurately support fine-scale processes.

Proprietary Algorithms

Verity’s proprietary endpoint trace generation algorithms and detection algorithms using EP Designer and Neural Networks, among other superior algorithms, provide support for fine-scale processes.

High Reliability and Low-Cost Operations

Detection Performance

Achieves signal-to-noise levels capable of endpoint detection, delivering outstanding detection accuracy.

Low Costs

With virtually no detector degradation, maintenance costs are kept to a minimum.

Easy Configuration

Off-line reprocessing allows for simple condition selection.

Flexible System Configuration and Monitoring

Real-Time Monitoring

SpectraView™ software monitors and analyzes collected spectral data and configures endpoint detection algorithms.

Interface

Compatible with a range of protocols including RS232C, Digital I/O, and Ethernet, making it easy to integrate into existing equipment.

Hardware Specifications

G Series (Windows PC Control)

Type	SD1024G/GH	SD2048GH
CCD specifications	74 mm² Backthinned, cooled
Resolution	< 1.87nm	< 1.0nm
Minimum Exposure Time (Standard A/D)	13ms	7ms
Wavelength Range	200 ～ 800nm or 200 ～ 900nm
Size (mm)	H 142 × W 137.2 × L 259
Weight	3kg
Fiber	Custom-built by Verity
No. of Input Channels	Up to 8 fibers
I/F	USB or Ethernet
Power Specifications	20 – 28 VDC、45W

X Series (Built-in PC)

Type	SD1024G/GH	SD2048GH
CCD specifications	74 mm² Backthinned, cooled
Resolution	< 1.87nm	< 1.0nm
Minimum Exposure Time (Standard A/D)	13ms	7ms
Wavelength Range	200 ～ 800nm or 200 ～ 900nm
Size (mm)	H 142 × W 137.2 × L 259
Weight	3.4kg
Fiber	Custom-built by Verity
No. of Input Channels	Up to 8 fibers
I/F	USB or Ethernet
Power Specifications	20 – 28 VDC、45W